Opto-Electronic Advances, Volume. 2, Issue 3, 190002(2019)
Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids
Fig. 1. SEM images of surface structures under different magnifications (a–f), and XRD (g) and Raman (h) spectra of the Si prepared by LAA with a laser fluence of 3.8 J/cm2, a line interval of 5 μm and a scanning speed of 1 mm/s.(
Fig. 2. SEM images (a–f), XRD (g) and Raman (h) spectra of Si surfaces prepared by laser ablation in water with a laser fluence of 1.7 J/cm2, a line interval of 5 μm and a scanning speed of 1 mm/s.(
Fig. 3. SEM images (a–f), XRD (g) and Raman (h) spectra of Si surfaces prepared by laser ablation of Si in acetone with a laser fluence of 1.7 J/cm2, a line interval of 5 μm and a scanning speed of 1 mm/s.(
Fig. 4. Comparison of the Raman spectra of Si surfaces prepared by laser ablation in air, water and acetone.
Fig. 5. (a–c) Schematics of the proposed ablation scenarios in air, water and acetone, respectively.
Fig. 6. TEM images of (a–c) large and (d–f) small particle networks synthesized by LAA. (g) Size distribution of small particles.
Fig. 7. TEM images of (a–c) large particles and networks and (d–f) small particles synthesized by LAL in water. (g) Size distribution of small particles
Fig. 8. TEM images of (a–c) large and (d–f) small particle networks synthesized by LAL in acetone. (g) Size distribution of small particles.
Fig. 9. SEM images of structures obtained by LAL of Si in water at scanning speed of (a–c) 0.1, (d–f) 0.5, (g–i) 1 and (j–l) 2 mm/s with a scanning line interval of 15 μm.Parallel grooves obtained by LAL at 0.1 and 0.5 mm/s where some grooves were destroyed, presumably due to shockwaves. (
Fig. 10. SEM images of the structures obtained by LAL of Si in water at scanning speed of (a–c) 0.1, (d–f) 0.5, (g–i) 1 and (j–l) 2 mm/s with a scanning line interval of 20 μm.(
Fig. 11. Raman spectra of Si substrates ablated with line intervals of 15 μm (a) and 20 μm (b) at scanning speeds of 0.1, 0.5, 1 and 2 mm/s.The a-Si peak was marked in each Fig. to demonstrate the ubiquitous melting phenomena observed during LAL.
Fig. 12. SEM images of micro-structures obtained by LAL of Si in water with a line interval of 15 μm (a–f) at scanning speeds of 0.1 mm/s (a–c), 0.5 mm/s (d–f), 2 mm/s (g–i) and a line interval of 20 μm at a scanning speed of 0.1 mm/s (j–o).(
Fig. 13. SEM images of the hierarchical micro/nanostructures obtained by LAL of Si in water with a line interval of 20 μm at scanning speeds of 0.1 (a–c), 0.5 (d–f), 1 mm/s (g–i) and 2 mm/s (j–o).(
Fig. 14. SEM images of micro/nano structures obtained by LAL of Si in water with a line interval of 20 μm at scanning speeds of 0.1 (a–f) and 1 mm/s (g–l).(
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Dongshi Zhang, Koji Sugioka. Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids[J]. Opto-Electronic Advances, 2019, 2(3): 190002
Category: Original Article
Received: Jan. 12, 2019
Accepted: Mar. 15, 2019
Published Online: Apr. 8, 2019
The Author Email: Sugioka Koji (ksugioka@riken.jp)