Acta Optica Sinica, Volume. 41, Issue 8, 0823018(2021)

Critical Technologies of Micro-Nano-Manufacturing and Its Applications for Flexible Optoelectronic Devices

Linsen Chen*, Wen Qiao**, Yan Ye, Yanhua Liu, and Donglin Pu
Author Affiliations
  • School of Optoelectronic Science and Engineering, Soochow University, Suzhou, Jiangsu 215006, China
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    Flexible optoelectronic devices put forward higher requirements for micro-nano fabrication technology, including large-scale, complex surface-relief structure, cross-scale, transparent or flexible substrate, and so on. In this paper, 3D laser direct writing technology and frequency variable interference lithography technology based on phase element modulation are introduced. These fabrication technologies are adopted to pattern complex surface relief structures and pixelated nanostructures, respectively. In addition, the micro-nano additive manufacturing based on structural confined electroplating or coating methods provide environmentally friendly fabrication means for functional materials. Enabled by micro-nano-patterning and structural functionalization platform, novel applications of flexible optoelectronic materials/devices are highlighted. Predictably, micro-nano-manufacturing technology will promote the rapid development of the flexible optoelectronic industry.

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    Linsen Chen, Wen Qiao, Yan Ye, Yanhua Liu, Donglin Pu. Critical Technologies of Micro-Nano-Manufacturing and Its Applications for Flexible Optoelectronic Devices[J]. Acta Optica Sinica, 2021, 41(8): 0823018

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    Paper Information

    Category: Optical Devices

    Received: Dec. 11, 2020

    Accepted: Feb. 23, 2021

    Published Online: Apr. 10, 2021

    The Author Email: Chen Linsen (lschen@suda.edu.cn), Qiao Wen (wqiao@suda.edu.cn)

    DOI:10.3788/AOS202141.0823018

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