Acta Optica Sinica, Volume. 41, Issue 8, 0823018(2021)
Critical Technologies of Micro-Nano-Manufacturing and Its Applications for Flexible Optoelectronic Devices
Flexible optoelectronic devices put forward higher requirements for micro-nano fabrication technology, including large-scale, complex surface-relief structure, cross-scale, transparent or flexible substrate, and so on. In this paper, 3D laser direct writing technology and frequency variable interference lithography technology based on phase element modulation are introduced. These fabrication technologies are adopted to pattern complex surface relief structures and pixelated nanostructures, respectively. In addition, the micro-nano additive manufacturing based on structural confined electroplating or coating methods provide environmentally friendly fabrication means for functional materials. Enabled by micro-nano-patterning and structural functionalization platform, novel applications of flexible optoelectronic materials/devices are highlighted. Predictably, micro-nano-manufacturing technology will promote the rapid development of the flexible optoelectronic industry.
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Linsen Chen, Wen Qiao, Yan Ye, Yanhua Liu, Donglin Pu. Critical Technologies of Micro-Nano-Manufacturing and Its Applications for Flexible Optoelectronic Devices[J]. Acta Optica Sinica, 2021, 41(8): 0823018
Category: Optical Devices
Received: Dec. 11, 2020
Accepted: Feb. 23, 2021
Published Online: Apr. 10, 2021
The Author Email: Chen Linsen (lschen@suda.edu.cn), Qiao Wen (wqiao@suda.edu.cn)