Infrared and Laser Engineering, Volume. 53, Issue 2, 20230536(2024)
Displacement measurement error of grating interferometer based on vector diffraction theory
Fig. 1. Schematic of grating interferometer displacement measurement
Fig. 2. Assembled state diagram of the grating relative displacement table
Fig. 6. Effect of
Fig. 7. Effect of
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Lihua Lei, Yujie Zhang, Yunxia Fu. Displacement measurement error of grating interferometer based on vector diffraction theory[J]. Infrared and Laser Engineering, 2024, 53(2): 20230536
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Received: Oct. 20, 2023
Accepted: --
Published Online: Mar. 27, 2024
The Author Email: Fu Yunxia (fuyx@simt.com.cn)