Fig. 1. Schematic of grating interferometer displacement measurement

Fig. 2. Assembled state diagram of the grating relative displacement table

Fig. 3. Analogue measurement error at a displacement of 100 mm

Fig. 4. Readhead assembly error diagram

Fig. 5. Grating vector incidence plane view

Fig. 6. Effect of β-angle on measurement error when other effects are absent

Fig. 7. Effect of β-angle on measurement error when other effects are present