Optics and Precision Engineering, Volume. 20, Issue 8, 1747(2012)
Interferometric displacement measurement of microcantilevers based on integrated dual gratings
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FENG Jin-yang, YE Xiong-ying, CHEN Feng, SHANG Yuan-fang. Interferometric displacement measurement of microcantilevers based on integrated dual gratings[J]. Optics and Precision Engineering, 2012, 20(8): 1747
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Received: Apr. 26, 2012
Accepted: --
Published Online: Sep. 4, 2012
The Author Email: Jin-yang FENG (fengjy06@mails.thu.edu.cn)
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