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Laser Journal, Volume. 45, Issue 4, 75(2024)

Phase unwrapping algorithm of nanoscale step morphology with partially coherent optical interference

WU Xuhui... LIU Jiaojiao, WANG Bingnan, LIU Xudong and WANG Jinqing* |Show fewer author(s)
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  • College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China
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    WU Xuhui, LIU Jiaojiao, WANG Bingnan, LIU Xudong, WANG Jinqing. Phase unwrapping algorithm of nanoscale step morphology with partially coherent optical interference[J]. Laser Journal, 2024, 45(4): 75

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    Paper Information

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    Received: Oct. 6, 2023

    Accepted: Nov. 26, 2024

    Published Online: Nov. 26, 2024

    The Author Email: Jinqing WANG (jqwang@cjlu.edu.cn)

    DOI:10.14016/j.cnki.jgzz.2024.04.075

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology