Laser Journal, Volume. 45, Issue 4, 75(2024)

Phase unwrapping algorithm of nanoscale step morphology with partially coherent optical interference

WU Xuhui, LIU Jiaojiao, WANG Bingnan, LIU Xudong, and WANG Jinqing*
Author Affiliations
  • College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China
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    Aiming at the shape measurement requirements of nano-step objects, a partially coherent optical offaxis image plane interferometry system is designed and constructed. Phase unwrapping, as a key step of interferometry, requires fast speed, high precision and strong adaptability. In this paper, the characteristics of five common phase unwrapping algorithms are analyzed, and a fusion algorithm based on region segmentation is proposed based on the morphology characteristics of nanosteps. This algorithm solves the quality of each segment by combining the light intensity map with the tangent line, and uses the powerless least square method and the tangent method to phase expansion in the high and low quality regions respectively, so as to meet the requirements of real-time measurement and accuracy. The experimental results show that, compared with other algorithms, the proposed algorithm has high precision, fast solving speed, anti-interference to residual handicap, and has certain application value to the measurement of nanometer step topography under partial coherent light interference.

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    WU Xuhui, LIU Jiaojiao, WANG Bingnan, LIU Xudong, WANG Jinqing. Phase unwrapping algorithm of nanoscale step morphology with partially coherent optical interference[J]. Laser Journal, 2024, 45(4): 75

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    Paper Information

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    Received: Oct. 6, 2023

    Accepted: Nov. 26, 2024

    Published Online: Nov. 26, 2024

    The Author Email: Jinqing WANG (jqwang@cjlu.edu.cn)

    DOI:10.14016/j.cnki.jgzz.2024.04.075

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