Influence of Beam Polarization on Contrast of Self-Referencing Interference Signal

Mengnan Xu; Zengxiong Lu; Yuejing Qi; Jing Li; Jing Ma

doi:10.3788/LOP202259.2326002

Laser & Optoelectronics Progress, Volume. 58, Issue 23, 2326002(2021)

Influence of Beam Polarization on Contrast of Self-Referencing Interference Signal

Mengnan Xu^1,2, Zengxiong Lu^1,2、***, Yuejing Qi^1,2、**, Jing Li^1,2、*, and Jing Ma¹

Author Affiliations

¹Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

²University of Chinese Academy of Sciences, Beijing 100094, China

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Figures & Tables(11)

Fig. 1. Optical path of the phase grating position measurement system. (a) Optical path of the phase grating position measurement system; (b) top view of prism P₁; (c) side view of prism P₂

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Fig. 2. Schematic diagram of light vector relationship between two adjacent reflecting surfaces in space

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Fig. 3. Interference signals at different positions of the phase grating (simulation experiment). (a) Δy=-8 μm & 0 μm; (b) Δy=-7.2 μm &-0.8 μm; (c) Δy=-6.4 μm & -1.6 μm; (d) Δy=-5.6 μm & -2.4 μm; (e) Δy=-4.8 μm & -3.2 μm; (f) Δy=-4 μm

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Fig. 4. Normalized interference signal on detector D under ideal conditions

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Fig. 5. Influence of S₀ extinction ratio on the interference signal contrast and peak intensity. (a) Signal contrast; (b) peak intensity

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Fig. 6. Influence of PBS extinction ratio on interference signal contrast and peak intensity. (a) Signal contrast; (b) peak intensity

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Fig. 7. Influence of the polarization state of the incident light on the contrast of the interference signal. (a) Relationship between the ellipticity and ellipse angle of the incident light and the contrast of the interference signal; (b) partial enlargement

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Fig. 8. Relationship between the contrast of the interference signal and the phase difference

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Fig. 9. Polarization value range of incident light with interference signal contrast greater than 0.98 under different optical path differences

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Table 1. Rotation matrix between the reflective surfaces in prisms P₁ and P₂
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Table 1. Rotation matrix between the reflective surfaces in prisms P₁ and P₂
$G_{S_{0}}$ $G_{S_{12}}$ ， $G_{S_{21}}$ $G_{S_{13}}$ ， $G_{S_{22}}$ $G_{S_{14}}$ ， $G_{S_{23}}$
$\frac{1}{\sqrt[]{2}} [\begin{matrix} \begin{matrix} 1 \end{matrix} & \begin{matrix} - 1 \end{matrix} \\ \begin{matrix} 1 \end{matrix} & \begin{matrix} 1 \end{matrix} \end{matrix}]$ $\frac{1}{\sqrt[]{2}} [\begin{matrix} \begin{matrix} - 1 \end{matrix} & \begin{matrix} - 1 \end{matrix} \\ \begin{matrix} 1 \end{matrix} & \begin{matrix} - 1 \end{matrix} \end{matrix}]$ $[\begin{matrix} \begin{matrix} 0 \end{matrix} & \begin{matrix} 1 \end{matrix} \\ \begin{matrix} - 1 \end{matrix} & \begin{matrix} 0 \end{matrix} \end{matrix}]$ $[\begin{matrix} \begin{matrix} 0 \end{matrix} & \begin{matrix} - 1 \end{matrix} \\ \begin{matrix} 1 \end{matrix} & \begin{matrix} 0 \end{matrix} \end{matrix}]$

Table 2. Contrast of interference signal between simulation experiment and theoretical model under different parameters

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Table 2. Contrast of interference signal between simulation experiment and theoretical model under different parameters

Serial number	Polarization state of incident light		Optical path difference	Extinction ratio		Interference signal contrast
Serial number	$ψ$ /rad	$t a n ε$	OPD /nm	$τ_{S_{0}}$	$τ_{P B S}$	$V_{e}$	$V$
1	0.7854	0	0	1000	1000	1	1
2	0.7854	1	0	1000	1000	0	0
3	0.7156	0.40	20	99	399	0.4387	0.4303
4	2.356	0.63	30	99	399	0.5735	0.5830
5	0.6997	0.10	15.38	1000	1000	0.9071	0.9045
6	0.8330	0.09	5.12	1000	1000	0.9874	0.9875
7	0.7759	0.09	5.12	1000	1000	0.9923	0.9924

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Mengnan Xu, Zengxiong Lu, Yuejing Qi, Jing Li, Jing Ma. Influence of Beam Polarization on Contrast of Self-Referencing Interference Signal[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2326002

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