International Journal of Extreme Manufacturing, Volume. 2, Issue 4, 45102(2020)

Surface defects incorporated diamond machining of silicon

Neha Khatri1,*... Borad M Barkachary2, B Muneeswaran3, Rajab Al-Sayegh4, Xichun Luo5, and Saurav Goel6,7,89 |Show fewer author(s)
Author Affiliations
  • 1Optical Devices & System Division, CSIR-CSIO, Sector 30, Chandigarh, 160030, India
  • 2Department of Mechanical Engineering, Jorhat Institute of Science & Technology, Jorhat Assam 785010, India
  • 3Fenner Conveyor Belting Pvt. Ltd., Dindigul Road Nagri, Madurai, Vadipatti Taluk 625 221, India
  • 4College of Engineering, Northern Border University, Arar 91431, Saudi Arabia
  • 5Centre for Precision Manufacturing, DMEM, University of Strathclyde, Glasgow G1 1XQ, United Kingdom
  • 6School of Engineering, London South Bank University, 103 Borough Road, London SE1 0AA, United Kingdom
  • 7EPSRC Centre for Doctoral Training in Ultra-Precision Engineering, University of Cambridge and Cranfield University, Cranfield, United Kingdom
  • 8School of Aerospace, Transport and Manufacturing, Cranfield University, Bedfordshire MK43 0AL, United Kingdom
  • 9Department of Mechanical Engineering, Shiv Nadar University, Gautam Budh Nagar 201314, India
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    Neha Khatri, Borad M Barkachary, B Muneeswaran, Rajab Al-Sayegh, Xichun Luo, Saurav Goel. Surface defects incorporated diamond machining of silicon[J]. International Journal of Extreme Manufacturing, 2020, 2(4): 45102

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    Paper Information

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    Received: May. 15, 2020

    Accepted: --

    Published Online: Apr. 16, 2021

    The Author Email: Khatri Neha (nehakhatri@csio.res.in)

    DOI:10.1088/2631-7990/abab4a

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