Al micropore array wet etching

Infrared and Laser Engineering, Volume. 44, Issue 10, 3055(2015)

Han Jun¹, Fan Linlin^1,2、*, and Liu Huan^1,3

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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Han Jun, Fan Linlin, Liu Huan. Al micropore array wet etching[J]. Infrared and Laser Engineering, 2015, 44(10): 3055

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Paper Information

Category: 微纳光学

Received: Feb. 13, 2015

Accepted: Mar. 17, 2015

Published Online: Jan. 26, 2016

The Author Email: Linlin Fan (aizhulin1314@126.com)

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