Fig. 1. The interferometry system based on compensation control

Fig. 2. Block diagram of hysteresis nonlinear compensation control system for piezoelectric ceramic actuator

Fig. 3. The principle of phase-locked amplifier

Fig. 4. Hysteresis of Piezoelectric ceramic actuator

Fig. 5. Feedforward open-loop control based on piezoelectric ceramic actuator transfer function

Fig. 6. Feasibility verification of phase-locked amplifier

Fig. 7. Error of simulation and experimental data of phase-locked amplifier

Fig. 8. Periodic triangular wave control signal

Fig. 9. Displacement signal

Fig. 10. Tracking control with hysteresis nonlinear compensated

Fig. 11. The hysteresis nonlinear of piezoelectric ceramic actuator displacement with compensated and without compensated

Fig. 12. The surface morphology of the samples measured by the interferometer without and with compensated

Fig. 13. Continuous measurement results under compensation control