Infrared and Laser Engineering, Volume. 52, Issue 9, 20230179(2023)
Research progress of reliability of MEMS fast steering mirror for satellite laser communication
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![(a) Perspective; (b) Assembly drawing of piezoelectric ceramic FSM[22]](/Images/icon/loading.gif){kind=icon}
Fig. 1. (a) Perspective; (b) Assembly drawing of piezoelectric ceramic FSM[22]
Fig. 2. (a) Electrostatically driven MEMS FSM structure; (b) Experimental setup[32]
Fig. 3. (a) Electromagnetically driven MEMS FSM structure; (b) Experimental setup[35]
Fig. 4. Piezoelectric MEMS FSM manufactured by SIMIT. (a) MEMS FSM; (b) Packaged MEMS FSM
Fig. 5. Piezoelectric MEMS FSM manufactured by SIMIT. (a) 14.34 grms random vibration; (b) 500 g shock simulation
Fig. 7. A scratch-induced bonding interface defect imaged by (a) C-SAM, confocal scanning acoustic microscope; (b) InGaAs camera with diascopic illumination; (c) InGaAs camera with episcopic illumination; (d) IR laser confocal microscope
Table 1. Typical performance parameters and features of FSM
View tableView in ArticleTable 1. Typical performance parameters and features of FSM
Performance parameters Quality/g Mirror size/mm Optical angle/ mrad Control bandwidth/Hz Advantages Disadvantages Traditional FSM Voice coil motors ~600 20-80 20-70 75-300 High angle, high accuracy Great power consumption, large volume Piezoelectric ceramics ~400 20-100 3-10 150-1000 Fast response speed, High resolution Hysterics characteristics MEMS FSM Electrostatic ~10 <10 3-40 100-1500 Integrated, low power consumption, miniaturization Small mirror size Electromagnetic Piezoelectric
Table 2. Common failure mechanisms and AFs of FSM
View tableView in ArticleTable 2. Common failure mechanisms and AFs of FSM
Failure mechanism Acceleration factors Fracture Acceleration, vibration frequency Creep Temperature, applied stress and strain Wear Load, speed, temperature, Composition of environment Stiction Mechanical shocks, vibration, voltage Cyclic fatigue Applied stress and strain, temperature, Number of cycles Electromigration Current density, temperature Electrostatic discharge Charged devices, charged environment, Cosmic rays Corrosion Voltage and polarity, temperature
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Weihong Zhu, Yang Wang, Lihao Wang, Yichen Liu, Zhenyu Wu. Research progress of reliability of MEMS fast steering mirror for satellite laser communication[J]. Infrared and Laser Engineering, 2023, 52(9): 20230179
Paper Information
Category: Optical communication and sensing
Received: Mar. 30, 2023
Accepted: --
Published Online: Oct. 23, 2023
The Author Email: Wu Zhenyu (zhenyu.wu@mail.sim.ac.cn)
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