Journal of Synthetic Crystals, Volume. 49, Issue 3, 521(2020)
Effect of Three-layer SiNx-SiNx-SiO2 Anti-reflection Films for Polycrystalline Silicon Solar Cells Performance
References(2)
[4] [4] Schmidt J. Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO2/plasma SiNx stacks[J].Semicond.Sci.Technol.,2001,16(1):164-170.
[6] [6] Glunz S W, Biro D, Rein S, et al. Field-effect passivation of the SiO2-Si interface[J].Appl. Phys.,1999,86 (1):683-691.
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MA Xinjian. Effect of Three-layer SiNx-SiNx-SiO2 Anti-reflection Films for Polycrystalline Silicon Solar Cells Performance[J]. Journal of Synthetic Crystals, 2020, 49(3): 521
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Published Online: Jun. 15, 2020
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