Infrared and Laser Engineering, Volume. 53, Issue 10, 20240319(2024)
Substrate material selection method for multilayer diffraction elements based on extended scalar diffraction theory
Figures & Tables(9)
Fig. 4. ESDT PIDE with respect to angle under different period widths
Fig. 5. 3D relationship diagram of PIDE, incident angle, and period width for different base material combinations
Table 1. Diffraction efficiency difference obtained based on ESDT
View tableView in ArticleTable 1. Diffraction efficiency difference obtained based on ESDT
Substrate material Period width/μm 500 600 700 800 900 1000 ZNSE-ZNS 20.28 14.88 11.97 10.27 9.19 8.47 AMTIR1-ZNS 17.63 13.76 11.76 10.61 9.88 9.38 AMTIR1-ZNSE 47.00 43.80 38.52 35.46 32.52 29.52 IRG26-ZNS 37.54 37.20 36.78 36.43 36.17 35.96 IRG26-ZNSE 44.73 45.97 45.71 43.72 46.30 51.44 GE-ZNS 87.72 90.26 91.30 91.80 92.09 92.27
Table 2. The angle range where PIDE ≥ 90%, in the context of the MWIR-LWIR dual band
View tableView in ArticleTable 2. The angle range where PIDE ≥ 90%, in the context of the MWIR-LWIR dual band
Substrate material Period width/μm 500 600 700 800 900 1000 ZNSE-ZNS −4.5-10.0 −5.9-10.0 −6.8-10.0 −7.4-10.0 −7.9-10.0 −8.3-10.0 ±4.5 ±5.9 ±6.8 ±7.4 ±7.9 ±8.3 AMTIR1-ZNS −5.4-10.0 −6.5-10.0 −7.2-10.0 −7.6-10.0 −8.0-10.0 −8.2-10.0 ±5.4 ±6.5 ±7.2 ±7.6 ±8.0 ±8.2 AMTIR1-ZNSE 4.6-10.0 2-10.0 0.3-10.0 −1-10.0 −1.9-10.0 −2.7-10.0 - - - ±1.0 ±1.9 ±2.7 IRG26-ZNS −3.1-9.9 −3.9-9.1 −4.4-8.6 −4.8-8.3 −5.0-8.0 −5.2-7.9 ±3.1 ±3.9 ±4.4 ±4.8 ±5.0 ±5.2 IRG26-ZNSE 4.6-9.4 2.8-10.0 1.6-10.0 0.9-9.8 0.3-9.0 −0.2-8.4 - - - - - ±0.2 GE-ZNS −1.0-4.8 −1.4-4.3 −1.7-4.0 −1.9-3.8 −2.0-3.7 −2.1-3.6 ±1.0 ±1.4 ±1.7 ±1.9 ±2.0 ±2.1
Table 3. The angle range where PIDE ≥ 95%, in the context of the MWIR-LWIR dual band
View tableView in ArticleTable 3. The angle range where PIDE ≥ 95%, in the context of the MWIR-LWIR dual band
Substrate material Period width/μm 500 600 700 800 900 1000 ZNSE-ZNS −2.4-10.0 −3.7-10.0 −4.6-10.0 −5.2-10.0 −5.7-10.0 −6.0-10.0 ±2.4 ±3.7 ±4.6 ±5.2 ±5.7 ±6.0 AMTIR1-ZNS −3.3-10.0 −4.3-10.0 −5.0-10.0 −5.5-9.9 −5.8-9.6 −6.0-9.4 ±3.3 ±4.3 ±5.0 ±5.5 ±5.8 ±6.0 AMTIR1-ZNSE 5.9-9.9 3.6-10.0 2.1-10.0 1.0-10.0 0.2-10.0 −0.5-10.0 - - - - - ±0.5 IRG26-ZNS −1.5-8.3 −2.3-7.5 −2.8-7.0 −3.1-6.7 −3.4-6.4 −3.6-6.2 ±1.5 ±2.3 ±2.8 ±3.1 ±3.4 ±3.6 IRG26-ZNSE - - - - - - - - - - - - GE-ZNS 0.8-2.9 0.5-2.4 0.2-2.1 0.1-1.8 0.0-1.7 −0.1-1.6 - - - - - ±0.1
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Zonglin LIANG, Bo ZHANG, Yuanming ZHAO, Mingxu PIAO, Yiyang DONG, Yueling ZHANG, Shoufeng TONG. Substrate material selection method for multilayer diffraction elements based on extended scalar diffraction theory[J]. Infrared and Laser Engineering, 2024, 53(10): 20240319
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Received: Jul. 15, 2024
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Published Online: Dec. 13, 2024
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