Chinese Optics Letters, Volume. 16, Issue 1, 011404(2018)
Stress damage process of silicon wafer under millisecond laser irradiation
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Zhichao Jia, Tingzhong Zhang, Huazhong Zhu, Zewen Li, Zhonghua Shen, Jian Lu, Xiaowu Ni. Stress damage process of silicon wafer under millisecond laser irradiation[J]. Chinese Optics Letters, 2018, 16(1): 011404
Category: Lasers and Laser Optics
Received: Sep. 12, 2017
Accepted: Dec. 1, 2017
Published Online: Jul. 17, 2018
The Author Email: Xiaowu Ni (nxw@njust.edu.cn)