Chinese Optics Letters, Volume. 16, Issue 1, 011404(2018)

Stress damage process of silicon wafer under millisecond laser irradiation

Zhichao Jia1, Tingzhong Zhang2, Huazhong Zhu1, Zewen Li1, Zhonghua Shen1, Jian Lu1, and Xiaowu Ni1、*
Author Affiliations
  • 1School of Science, Nanjing University of Science & Technology, Nanjing 210094, China
  • 2Institute of Mechanical and Electrical Engineering, Zhoukou Normal University, Zhoukou 466000, China
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    Zhichao Jia, Tingzhong Zhang, Huazhong Zhu, Zewen Li, Zhonghua Shen, Jian Lu, Xiaowu Ni. Stress damage process of silicon wafer under millisecond laser irradiation[J]. Chinese Optics Letters, 2018, 16(1): 011404

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Sep. 12, 2017

    Accepted: Dec. 1, 2017

    Published Online: Jul. 17, 2018

    The Author Email: Xiaowu Ni (nxw@njust.edu.cn)

    DOI:10.3788/COL201816.011404

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