Optics and Precision Engineering, Volume. 26, Issue 7, 1(2018)
[in Chinese]
[1] ZHENG Yan-chang, HU Hua-kui, QIU Ke-qiang, WANG Hai, XU Xiang-dong, FU Shao-jun. Method for increasing duty cycle of photoresist grating by hot pressing and its application[J]. Optics and Precision Engineering, 2019, 27(1): 94
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. [J]. Optics and Precision Engineering, 2018, 26(7): 1
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Published Online: Oct. 2, 2018
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DOI:
CSTR:32186.14.
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