Wideband large dispersion group delay chip based on silicon photonics integration (<i>Invited</i>)

Hongwei Chen; Zhenmin Du; Tingzhao Fu; Sigang Yang; Minghua Chen

doi:10.3788/IRLA20211045

Infrared and Laser Engineering, Volume. 50, Issue 7, 20211045(2021)

Wideband large dispersion group delay chip based on silicon photonics integration (Invited)

Hongwei Chen1...2, Zhenmin Du1,2, Tingzhao Fu1,2, Sigang Yang1,2, and Minghua Chen12 |Show fewer author(s)

Author Affiliations

¹Department of Electronic Engineering, Tsinghua University, Beijing 100084, China

²Beijing National Research Center for Information Science and Technology, Beijing 100084, China

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Fig. 1. Loss analysis of waveguide and the influence of Δneff on grating performance. (a) Loss analysis coordinate system; (b) Loss changes with aspect ratio and bending radius of the waveguide; (c) Grating overall loss and neff₁ change with w₁; (d) Grating reflectivity and GDR change with w₁

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Fig. 2. Silicon integrated chirp Bragg grating chip. (a) Micrograph; (b) SEM of waveguide; (c) SEM of spiral grating

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Fig. 3. Chirped Bragg grating response and the apodized chirped Bragg grating response obtained in the experiment. (a) Chirped Bragg grating response with length of 23.4 cm; (b) Apodized chirped Bragg grating response with length of 23.4 cm; (c) Chirped Bragg grating response with length of 13.8 cm; (d) Apodized chirped Bragg grating response with length of 13.8 cm

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Table 1. Performance comparison of different schemes to realize group delay

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Table 1. Performance comparison of different schemes to realize group delay

Ref.	Group	Group delay /ps	Tunability /ps	Bandwidth /nm	Size /mm²	Delay bandwidth product/ps·nm	Delay bandwidth product per unit area /ps·nm·mm⁻²	Material	Technology
[12]	K.J.Vahala	68000	N/A	Wideband	9025	-	-	Silicon	Path select
[13]	S.S.Patel	2560	Tunable	0.2	1200	512	0.43	SiO₂
[14]	D.J.Blumenthal	12350	850	>40	3825	>494000	129.15	Silicon Nitride
[15]	T.Baba	54	Tunable	3	16.48	162	9.83	Silicon	Slow light
[16]	R.T.Chen	216.7	Tunable	25	0.18	5417.5	30097	Silicon	Slow light
[17]	D.V.Plant	96	Tunable	8	0.015	768	61200	Silicon	Bragg grating
[18]	K.petermann	450	Tunable	1.2	>100	540	<0.54	Silicon	Bragg grating
[19]	J P.Chen	110	10	0.08	~1	8.8	~8.8	Silicon	Micro-ring
[20]	Andrea Melloni	800	100	0.08	~1	64	~64	Silicon Oxynitride	Micro-ring
-	H.W.Chen(this work)	2440	N/A	9.4	9.07	22936	2528	Silicon Nitride	Bragg grating

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Hongwei Chen, Zhenmin Du, Tingzhao Fu, Sigang Yang, Minghua Chen. Wideband large dispersion group delay chip based on silicon photonics integration (Invited)[J]. Infrared and Laser Engineering, 2021, 50(7): 20211045

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