Acta Optica Sinica, Volume. 39, Issue 12, 1231001(2019)
Uniformity of Film Thickness Distribution for Single Evaporation Source
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Xiuhua Fu, Di Zhao, Cheng Lu, Guojun Ma, Ganghua Bao. Uniformity of Film Thickness Distribution for Single Evaporation Source[J]. Acta Optica Sinica, 2019, 39(12): 1231001
Category: Thin Films
Received: Jul. 1, 2019
Accepted: Aug. 14, 2019
Published Online: Dec. 6, 2019
The Author Email: Zhao Di (zhaodi9425@163.com)