Acta Optica Sinica, Volume. 43, Issue 9, 0931002(2023)

Design and Fabrication of Si/ZnO Multilayer Films Based on Energy Band Structure Characteristics

Jiawei Li, Xiangcheng Li*, Ping′an Chen, Yingli Zhu, and Boquan Zhu
Author Affiliations
  • The State Key Laboratory of Refractories and Metallurgy, Wuhan University of Science and Technology, Wuhan 430081, Hubei, China
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    Figures & Tables(11)
    Equivalent model of one-dimensional photonic crystal
    Energy band structures for photonic crystals with three different multilayer films. (a) na=nb; (b) na>nb; (c) na≫nb
    Refractive indexes and extinction coefficients of Si, SiO2 and ZnO thin films. (a) Refractive index; (b) extinction coefficient
    Energy band curve of Si/ZnO photonic crystal. (a) HL1 structure; (b) HL2 structure
    Simulated reflectance spectra of photonic crystals with different layers
    Simulated reflectance spectra for HL1 and HL2. (a) HL1; (b) HL2
    Structural diagram of 13-layer photonic crystal and reflection spectra of different photonic crystals. (a) Structural diagram of 13-layer photonic crystal; (b) reflection spectra of Si/SiO2 and Si/ZnO photonic crystals
    Simulated reflectance spectrum of photonic crystal at incidence angle range of 0°-60°
    Electric field intensity distribution of incident electromagnetic wave. (a) Center wavelength of 3.8 μm; (b) center wavelength of 10.4 μm; (c) center wavelength of 6.5 μm
    Comparison of measured and calculated infrared reflectances
    • Table 1. Proportion of HL1 and HL2 in photonic crystals with different layers

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      Table 1. Proportion of HL1 and HL2 in photonic crystals with different layers

      Photonic crystal9 layers11 layers13 layers15 layers17 layers
      HL1(Si/ZnO)2Si(Si/ZnO)3Si(Si/ZnO)3Si(Si/ZnO)4Si(Si/ZnO)4Si
      HL2(Si/ZnO)2(Si/ZnO)2(Si/ZnO)3(Si/ZnO)3(Si/ZnO)4
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    Jiawei Li, Xiangcheng Li, Ping′an Chen, Yingli Zhu, Boquan Zhu. Design and Fabrication of Si/ZnO Multilayer Films Based on Energy Band Structure Characteristics[J]. Acta Optica Sinica, 2023, 43(9): 0931002

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    Paper Information

    Category: Thin Films

    Received: Sep. 30, 2022

    Accepted: Nov. 25, 2022

    Published Online: Apr. 25, 2023

    The Author Email: Li Xiangcheng (lixiangcheng@wust.edu.cn)

    DOI:10.3788/AOS221778

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