Acta Optica Sinica, Volume. 43, Issue 9, 0931002(2023)
Design and Fabrication of Si/ZnO Multilayer Films Based on Energy Band Structure Characteristics
Fig. 1. Equivalent model of one-dimensional photonic crystal
Fig. 2. Energy band structures for photonic crystals with three different multilayer films. (a) na=nb; (b) na>nb; (c) na≫nb
Fig. 3. Refractive indexes and extinction coefficients of Si, SiO2 and ZnO thin films. (a) Refractive index; (b) extinction coefficient
Fig. 4. Energy band curve of Si/ZnO photonic crystal. (a) HL1 structure; (b) HL2 structure
Fig. 5. Simulated reflectance spectra of photonic crystals with different layers
Fig. 6. Simulated reflectance spectra for HL1 and HL2. (a) HL1; (b) HL2
Fig. 7. Structural diagram of 13-layer photonic crystal and reflection spectra of different photonic crystals. (a) Structural diagram of 13-layer photonic crystal; (b) reflection spectra of Si/SiO2 and Si/ZnO photonic crystals
Fig. 8. Simulated reflectance spectrum of photonic crystal at incidence angle range of 0°-60°
Fig. 9. Electric field intensity distribution of incident electromagnetic wave. (a) Center wavelength of 3.8 μm; (b) center wavelength of 10.4 μm; (c) center wavelength of 6.5 μm
Fig. 10. Comparison of measured and calculated infrared reflectances
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Jiawei Li, Xiangcheng Li, Ping′an Chen, Yingli Zhu, Boquan Zhu. Design and Fabrication of Si/ZnO Multilayer Films Based on Energy Band Structure Characteristics[J]. Acta Optica Sinica, 2023, 43(9): 0931002
Category: Thin Films
Received: Sep. 30, 2022
Accepted: Nov. 25, 2022
Published Online: Apr. 25, 2023
The Author Email: Li Xiangcheng (lixiangcheng@wust.edu.cn)