Acta Optica Sinica, Volume. 5, Issue 2, 157(1985)
In-situ measurement of inhomogeneity for optical thin films by ellipsometry
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WU QIHOUG. In-situ measurement of inhomogeneity for optical thin films by ellipsometry[J]. Acta Optica Sinica, 1985, 5(2): 157
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