[1] [1] A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, Nature 384, 49 (1996).

[2] [2] Z. Le and J. Liang, J. Opt. A: Pure and Appl. Opt. 5, 374 (2003).

[3] [3] J. Ye, Z. Le, J. Liang, K. Liu, B. Quan, Y. Qin, and G. Zhu, Chin. Opt. Lett. 2, 367 (2004).

[4] [4] V. V. Protopopov and K. A. Valiev, Opt. Commun. 151, 297 (1998).

[5] [5] B. Lengeler, J. Tummler, A. Snigirev, I. Snigireva, and C. Raven, J. Appl. Phys. 84, 5855 (1998).

[6] [6] A. Snigirev, V. Kohn, I. Snigireva, A. Souvorov, and B. Lengeler, Appl. Opt. 37, 653 (1998).

[7] [7] A. Snigirev, B. Filseth, P. Elleaume, Th. Klocke, V. Kohn, B. Lengeler, I. Snigireva, A. Souvorov, and J. Tuemmler, Proc. SPIE 3151, 164 (1997).

[8] [8] B. Lengeler, C. G. Schroer, M. Richwin, J. Tummler, M. Drakopoulos, A. Snigirev, and I. Snigireva, Appl. Phys. Lett. 74, 3924 (1999).

[9] [9] D. A. Arms, E. M. Dufresne, R. Clarke, S. B. Dierker, N. R. Pereira, and D. Foster, Rev. Sci. Instru. 73, 1492 (2002).

[10] [10] S. Bohic, A. Simionovici, A. Snigirev, R. Ortega, G. Deves, D. Heymann, and C. Schroer, Appl. Phys. Lett. 78, 3544 (2001).

[11] [11] J. W. Goodman, Introduction to Fourier Optics (2nd edition) (McGraw-Hill, New York, 1996) p.96.

[12] [12] M. Born and E. Wolf, Principles of Optics (7th edition) (Cambridge University Press, Cambridge, UK, 1999) p.484.