[1] [1] HU S, WANG Y, LIU Z, et al.. Exploration of measurement principle of a three-dimensional current sensor for measuring the upwelling［J］. Ocean Engineering, 2016, 127: 48-57.

[2] [2] LAW J, SUN W, WU Z, et al.. A low-cost reusable micro-newton scale micro-thruster［C］. International Conference on Solid-State Sensors, Actuators and Microsystems. 2017: 2055-2058.

[3] [3] LIN G, PALMER R E,PISTER K S,et al..Miniature heart cell force transducer system implemented in MEMS technology［J］IEEE Transactions on Biomedical Engineering, 2001,48(9): 996-1006.

[4] [4] XIE H,VITARD J,HALIYO S, et al..Enhanced accuracy of force application for AFM nanomanipulation using nonlinear calibra-tion of the optical lever［J］.IEEE Sensors Journal, 2008, 8(8): 1478-1485.

[5] [5] ALVO S,LAMBERT P, GAUTHIER M,et al..A van der waals force-based adhesion model for micromanipulation［J］. Journal of Adhesion Science and Technology, Special Issue on Adhesion in MEMS/NEMS, 2010, 15-1(24): 2415-2428.

[6] [6] HALIYO S, DIONNET F, RGNIER S. Controlled rolling of micro objects for autonomous micro manipulation［J］. International Journal of Micromechatronics, 2006,3(2): 75-101.

[7] [7] JIN W, MOTE C D. On the calibration of multicomponent microforce sensors［J］. Microelectromechanical Systems Journal of, 1998, 7(2): 156-163.

[8] [8] MOHAND OUSAID A, HALIYO S, REGNIER S, et al..Micro-Force sensor by active control of a comb-drive［J］. IEEE/ASME International Conference on Advanced Intelligent Mechatronics,2013,8212: 612-617.

[9] [9] YUVAL C,SHAY K,DANIEL L,et al..Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith ［P］.US: EP2768241 A1.2014.

[10] [10] NEWELL D B,KRAMAR J A,PRATT J R, et al..The NIST microforce realization and measurement project［J］. IEEE Transactions on Instrumentation and Measurement, 2003, 52(2): 508-511.

[11] [11] PRATT J R, KRAMAR J A. Si Realization of small forces using an electrostatic force balance［C］.XVIII IMEKD World Congress on Metro logy for a Sustainable Development,Rio de Janeiro,Brazil, 2006: 109.

[12] [12] LI X, SU D, ZHANG Z. A novel technique of microforce sensing and loading［J］. Sensors & Actuators A Physical, 2009, 153(1): 13-23.

[13] [13] WANG X L.Research on Key Technology Based on Stable Loading for the In-situ Calibration System of the Sensor［D］.Jilin: Jilin University, 2015. (in Chinese)

[14] [14] SUN Z, HAO L, LI S, et al.. A PVDF micro-force sensor based on inverse-model algorithm and its applications［C］. IEEE International Conference on Information and Automation, IEEE, 2011: 801-806.

[15] [15] ZHENG H M, LIU ZH SH, WANG Y.Study on the method of dynamic characteristic calibration of the 6-aixs wrist force sensor for robot［J］. Acta Metrologica Sinica, 2005, 26(1): 43-45. (in Chinese)

[16] [16] JABBOUR Z L,YANIV S L. The kilogram and the measurements of mass and force［J］. J. Res. Nat. Inst. Stand. Technol, 2001,106(1): 25–46.

[17] [17] HUANG B.Multi-axis force calibration method and system based on the flotation principle［D］. Hefei University of Technology, 2012. (in Chinese)

[18] [18] LU Q,HUANG W Q,WANG Y, et al..Optimaizatrion design of deep-notch elliptical flexure hinges［J］.Opt. Precision Eng., 2015, 23(1): 206-215.(in Chinese)

[19] [19] FU J J, YAN CH X, et al..Stiffness calculation and optimal design of elliptical flexure hinges［J］.Opt. Precision Eng., 2016,7(24),1703-1710. (in Chinese)

[20] [20] CAO Y, LIU K, SHAN CH CH, et al..Theory modeling and finite element analysis of tensile flexure hinge［J］.Opt. Precision Eng., 2016, 24(1): 119-125. (in Chinese)

[21] [21] ZUO X Y, LIU X M, et al..Calculation and analysis of rotational stiffness for three types of flexure hinges［J］.Chinese Journal of Scientific Instrument, 2006, 27(12): 1725-1728. (in Chinese)

[22] [22] CAI X , ZHAO M R, ZHENG Y L, et al.. Design of flexure hinges mechanism for 10-6 N~10-5 N micro force measurement［J］. Chinese Journal of Sensors and Actuators, 2014(11): 1451-1456. (in Chinese)

[23] [23] LIU MIN, ZHANG X M, Micro-displacement amplifier based on quasi-V-shaped flexure hinge［J］.Opt. Precision Eng., 2017, 25(4): 999-1008. (in Chinese)

[24] [24] PAROS J. How to design flexure hinges［J］. Mach Des, 1965, 37: 151-156.

[25] [25] WU Y, ZHOU Z. Design calculations for flexure hinges［J］. Review of Scientific Instruments, 2002, 73(8): 3101-3106.