Fig. 1. Schematic diagram of the structure of the sensor

Fig. 2. Diagram of the mechanical analysis of the sensor

Fig. 3. Sensor mode diagram

Fig. 4. Sensor stress profile plot

Fig. 5. Amplitude-frequency response curve

Fig. 6. Microscopic imaging packaging system

Fig. 7. Sensor packaging process diagram. (a) Group assembly part; (b) Packaging optical fiber; (c) Install the shell

Fig. 8. Schematic diagram of sensor testing system

Fig. 9. Curve of wavelength variation with excitation frequency in the Y axis. (a) Entirety; (b) 0-1200 Hz

Fig. 10. Curve of wavelength variation with excitation frequency in the X axis. (a) Entirety; (b) 0-1200 Hz

Fig. 11. Curve of wavelength variation with excitation frequency in the Z axis. (a) Entirety; (b) 0-1200 Hz

Fig. 12. Variation curve of sensitivity with acceleration

Fig. 13. Sensitivity linear fitting of time-domain characteristic curves in working and cross directions

Fig. 14. Impact response curve. (a) Time domain curve; (b) Frequency domain curve

Fig. 15. Repeatability test