Opto-Electronic Engineering, Volume. 32, Issue 2, 12(2005)
[in Chinese]
References(3)
[1] [1] SUGISAKI Katsumi, OSHINO Tetsuya. Assembly and alignment of three aspherical mirror optics for extreme ultraviolet projection lithography [J]. SPIE, 2000, 3998: 751-758.
[3] [3] BOLTON J F. A Technique For The Optical Analysis Of Deformed Telescope Mirrors[J]. SPIE, 1986, 628: 684-688.
[6] [6] LUC Arnold. Optimized Axial Suppor Topologies For Thin Telescope Mirrors[J]. Optical Engineering, 1995, 34(2): 67-73.
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[in Chinese], [in Chinese], [in Chinese]. [J]. Opto-Electronic Engineering, 2005, 32(2): 12
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