Fig. 1. Single frame of interferogram

Fig. 2. The process of interferogram region segmentation based on morphology principle

Fig. 3. The process of interferogram region segmentation based on the second-order gradient entropy

Fig. 4. Position registration process based on statistical analysis of sequential phase-shifting interferograms

Fig. 5. Position registration process of simultaneous phase-shifting interferograms based on phase correlation algorithm

Fig. 6. Diagram of lateral shearing interference

Fig. 7. Lateral shearing interferogram and edge detection