Fig. 1. Schematic of micro-bolometer structure view

Fig. 2. Schematic of infrared micro-bolometer structure

Fig. 3. RS distribution map of 1000 Å α-Si thin film

Fig. 4. Relationship of TCR with temperature of 1000Å α-Si thin film

Fig. 5. Particle map of 1000 Å α-Si thin film

Fig. 6. (a) Topview SEM of MEMS micro-bridge structure; (b) Cross-sectional view SEM of anchor and contact structure

Fig. 7. Cross-sectional TEM photo of α-Si sensing resistor on the micro-bridge surface

Fig. 8. I-V curve of electrode layer defined α-Si sensing resistor device

Fig. 9. Relationship of TCR with temperature of α-Si sensing resistor

Fig. 10. Optical photo of MEMS micro-bridge structure based micro-bolometer array device after releasing