Acta Optica Sinica, Volume. 30, Issue 5, 1413(2010)
Studies on Pulsed Laser Induced Damage of Silicon on Insulator Material
[1] [1] S. Cristoloveanu. Introduction to silicon on insulator materials and devices[J]. Microelectronic Engineering,1997,39(1-4):145-154
[2] [2] P. K. Vasudev. CMOS device and interconnect technology enhancements for low power/low voltage applications[J]. Solid-State Electronics,1996,39(4):481-488
[3] [3] S. Pae,T. Su. Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth[J]. IEEE Electron Device Lett.,1999,20(5):194-196
[4] [4] S. Tsao,H. Guo,C. Ko. 1×2 and 2×2 SOI switch applying in optical communication network[J]. Acta Optica Sinica,2003,23(S):783-784
[5] [5] J. Du,W. H. Ko,D. J. Young. Single crystal silicon MEMS fabrication based on smartcut technique[J]. Sensors and Actuators A,2004,112(1):116-121
[6] [6] W. Mokwa. Advanced sensors and microsystems on SOI[J]. International Journal of High Speed Electronics and Systems,2000,10(1):147-153
[10] [10] Weidong Gao,Meiqiong Zhan,Jianda Shao et al.. Laser-induced damage of single-crystalline silicon under different 1064 nm Nd:YAG laser modes[C]. SPIE,2005,5627:286-290
[15] [15] Sun Chengwei,Lu qisheng,Fan zhengxiu et al.. Effects of Laser Irradiation[M]. Beijing:National Defense Industry Press,2002
[16] [16] Wang Xucheng,Shao Min. The Basic Theory and Numerical Method of the Finite Element[M]. Beijing:Qinghua University press,1977
[17] [17] M. Kruer,R. Allen,L. Esterowitz et al.. Laser damage in silicon photodiodes[J]. Opt. Quant. Electron.,1976,8(5):453-458
[18] [18] Ding Yanfang. Studies of new SOI materials and relevant technologies & applications[D]. Shanghai:East China Normal University,2007. 20-21
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Fu Bo, Zhang Cuijuan, Luo Fei, Zhang Dayong, Shen Yongming, Liu Guodong, Yuan Yonghua, Luo Fu. Studies on Pulsed Laser Induced Damage of Silicon on Insulator Material[J]. Acta Optica Sinica, 2010, 30(5): 1413
Category: Materials
Received: Jun. 5, 2009
Accepted: --
Published Online: May. 11, 2010
The Author Email: Bo Fu (fubo@mail.nankai.edu.cn)