Infrared and Laser Engineering, Volume. 51, Issue 9, 20210915(2022)
Holographic microscopy detection method of microfluidic chip channel
Fig. 1. Schematic diagram of system coordinates
Fig. 2. Schematic of the experimental system of reflective off-axis IPDHM
Fig. 3. Correction results of surface fitting method for different polynomials. (a) 6-term quadratic polynomial; (b) 9-term quadratic polynomial; (c) Zernike higher order polynomial
Fig. 4. Experimental results of two-step phase subtraction method for micro-step. (a) Backgroud area hologram; (b) Micro-step hologram; (c) Reconstructed amplitude of background area; (d) Reconstructed amplitude of micro-step; (e) Unwrapped phase of backgroud area; (f) Unwrapped phase of micro-step; (g) Height distribution of micro-step; (h) 3D diagram of micro-step
Fig. 5. Comparison of experimental results of two-step phase subtraction method and surface fitting method
Fig. 6. Experimental results of the microfluidic chip channel. (a) Background area hologram; (b) Channel hologram; (c) Reproducted amplitude of background area; (d) Reproducted amplitude of channel; (e) Unwrapped phase of background area; (f) Unwrapped phase of channel; (g) Depth of channel; (h) 3D diagram of channel
Fig. 7. Experimental results of fractured surface defect. (a) Reproducted amplitude of channel and defect; (b) Magnified view of defect’s reproducted amplitude; (c) Depth of defect; (d) Depth distribution of the horizontal line in (c); (e) 3D diagram of defect
Fig. 8. Experimental results of defective surface defect. (a) Reproducted amplitude of channel and defect; (b) Magnified view of defect’s reproducted amplitude; (c) Depth of channel and defect ; (d) Depth distribution of the horizontal line in (c); (d) 3D diagram of defect
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Jianan Xu, Ming Kong, Wei Liu, Daodang Wang, Zhongsi Xie. Holographic microscopy detection method of microfluidic chip channel[J]. Infrared and Laser Engineering, 2022, 51(9): 20210915
Category: Photoelectric measurement
Received: Dec. 29, 2021
Accepted: --
Published Online: Jan. 6, 2023
The Author Email: Liu Wei (liuw@cjlu.edu.cn)