Acta Photonica Sinica, Volume. 52, Issue 12, 1223001(2023)
High Speed Scanning Piezoelectric MEMS Micro Mirrors for Laser Micro Displays
Figures & Tables(14)
Fig. 8. Voltage angle curve（testing，simulation，theoretical calculation）
Fig. 9. Frequency response curve under different voltages and relationship between quality factor and angle
Fig. 11. Angle and resonant frequency test at different temperatures
Table 1. Physical parameters of multi-layer composite beams
View tableView in ArticleTable 1. Physical parameters of multi-layer composite beams
Material Si SiO2 IrO PZT Au SiO2 Young's modulus/GPa 170 70 168 60.61 70 70 Thickness/μm 40 0.2 0.17 2 0.2 2
Table 2. Physical parameters required for simulation
View tableView in ArticleTable 2. Physical parameters required for simulation
Parameters Layer thickness/μm Young's modulus/GPa Poisson ratio Density/（kg·m-3） d31/（pm·V-1） Silicon 40 170 0.3 2 329 N/A PZT 2 60.61 0.28 7 500 -110
Table 3. Performance comparison between different drives
View tableView in ArticleTable 3. Performance comparison between different drives
Driving method Mirror diameter Resonant frequency Resonance angle ROBERT A［ 14 ］ES D=0.55 mm 34 kHz 25° CHEN M［ 15 ］EM D=1 mm 0.56 kHz 28° TANGUY Q［ 16 ］ET D=1 mm 1.19 kHz 16° GU-STOPPEL S［ 17 ］PE 1.1×1.1 mm2 0.58 kHz 5° ZHU Y［ 18 ］PE D=1 mm 23.9 kHz 21° Proposed method PE D=1.1 mm 31 kHz 40.66°
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Haoxiang LI, Wenjiang SHEN, Huijun YU. High Speed Scanning Piezoelectric MEMS Micro Mirrors for Laser Micro Displays[J]. Acta Photonica Sinica, 2023, 52(12): 1223001
Paper Information
Category: Optical Device
Received: May. 24, 2023
Accepted: Jul. 6, 2023
Published Online: Feb. 19, 2024
The Author Email: YU Huijun (hjyu2012@sinano.ac.cn)
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