Chinese Optics Letters, Volume. 10, Issue 12, 121202(2012)
In situ aberration measurement technique based on multi-illumination settings and principal component analysis of aerial images
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Dongbo Xu, Xiangzhao Wang, Yang Bu, Lifeng Duan, Guanyong Yan, Jishuo Yang, Anatoly Y.. In situ aberration measurement technique based on multi-illumination settings and principal component analysis of aerial images[J]. Chinese Optics Letters, 2012, 10(12): 121202
Paper Information
Category: Instrumentation, measurement, and metrology
Received: May. 31, 2012
Accepted: Jun. 20, 2012
Published Online: Oct. 19, 2012
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