Optics and Precision Engineering, Volume. 28, Issue 2, 382(2020)

Processing fused silica with wet chemical technology

YE Hui1... LI Ya-guo2, JIANG Chen1 and CHEN Qi1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(15)

    [1] [1] YE H, LI Y G, XU Q, et al.. Resistance of scratched fused silica surface to UV laser induced damage[J]. Scientific Reports, 2019, 9(1): 1-10.

    [2] [2] LAURENCE T A, BUDE J D, LY S, et al.. Extracting the distribution of laser damage precursors on fused silica surfaces for 351 nm, 3 ns laser pulses at high fluences (20-150 J/cm2)[J]. Optics Express, 2012, 20(10): 11561-11573.

    [3] [3] YE H, LI Y G, YUAN Z G, et al.. Improving UV laser damage threshold of fused silica optics by wet chemical etching technique[J]. SPIE, 2015, 9532: 953221.

    [4] [4] YE H, LI Y G, YUAN Z G, et al.. Laser induced damage characteristics of fused silica optics treated by wet chemical processes[J]. Applied Surface Science, 2015, 357: 498-505.

    [6] [6] BIENAIME K, BELIN C, GALLAIS L, et al.. Impact of storage induced outgassing organic contamination on laser induced damage of silica optics at 351 nm[J]. Optics Express, 2009, 17(21): 18703-18713.

    [7] [7] YE H, LI Y G, XU Q, et al.. Effects of wet chemical etching on scratch morphology and laser damage resistance of fused silica[J]. Silicon, 2020, 2: 425-432.

    [8] [8] YE H, LI Y G, YUAN Z G, et al.. Ultrasonic-assisted wet chemical etching of fused silica for high-power laser systems[J]. International Journal of Applied Glass Science, 2018, 9(2): 288-295.

    [9] [9] SURATWALA T I, MILLER P E, BUDE J D, et al.. HF-based etching processes for improving laser damage resistance of fused silica optical surfaces[J]. Journal of the American Ceramic Society, 2011, 94(2): 416-428.

    [10] [10] LU M L, MA B, ZHAN G D, et al.. Effect of etching on the laser-induced damage properties of artificial defects under 1064-nm laser irradiation[J]. Optical Engineering, 2014, 53(12): 122505.

    [12] [12] LI Y G, YUAN Z G, WANG J, et al.. Laser-induced damage characteristics in fused silica surface due to mechanical and chemical defects during manufacturing processes[J]. Optics & Laser Technology, 2017, 91: 149-158.

    [14] [14] YE H, LI Y G, ZHANG Q H, et al.. Post-processing of fused silica and its effects on damage resistance to nanosecond pulsed UV lasers[J]. Applied Optics, 2016, 55(11): 3017-3025.

    [15] [15] SURATWALA T I, STEELE W A, WONG L, et al.. Chemistry and formation of the beilby layer during polishing of fused silica glass[J]. Journal of the American Ceramic Society, 2015, 98(8): 2395-2402.

    Tools

    Get Citation

    Copy Citation Text

    YE Hui, LI Ya-guo, JIANG Chen, CHEN Qi. Processing fused silica with wet chemical technology[J]. Optics and Precision Engineering, 2020, 28(2): 382

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jun. 3, 2019

    Accepted: --

    Published Online: May. 27, 2020

    The Author Email:

    DOI:10.3788/ope.20202802.0382

    Topics