Acta Photonica Sinica, Volume. 35, Issue 3, 362(2006)
Simulation of Electric-mechanical Characteristics of Micromechanical Device Fabry-Perot Cavity on Silicon
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Ou Yi, Sun Yunan, Chen Dapeng, Cui Fang. Simulation of Electric-mechanical Characteristics of Micromechanical Device Fabry-Perot Cavity on Silicon[J]. Acta Photonica Sinica, 2006, 35(3): 362
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Received: Dec. 20, 2004
Accepted: --
Published Online: Jun. 3, 2010
The Author Email: Yi Ou (ouyi@ime.ac.cn)
CSTR:32186.14.
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