Acta Photonica Sinica, Volume. 35, Issue 3, 362(2006)

Simulation of Electric-mechanical Characteristics of Micromechanical Device Fabry-Perot Cavity on Silicon

Ou Yi1,*... Sun Yunan2, Chen Dapeng1 and Cui Fang2 |Show fewer author(s)
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    Ou Yi, Sun Yunan, Chen Dapeng, Cui Fang. Simulation of Electric-mechanical Characteristics of Micromechanical Device Fabry-Perot Cavity on Silicon[J]. Acta Photonica Sinica, 2006, 35(3): 362

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    Paper Information

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    Received: Dec. 20, 2004

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Yi Ou (ouyi@ime.ac.cn)

    DOI:

    CSTR:32186.14.

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