Opto-Electronic Engineering, Volume. 41, Issue 5, 34(2014)

Phase Locked Positioning Method in Heterodyne Interferometer System

ZHU Weibin1...2,*, ZHU Shan′an1 and YE Shuliang2 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(8)

    [1] [1] HAITJEM A H. Achieving traceability and sub-nanometer uncertainty using interferometric techniques [J]. Measurement Science and Technology(S0957-0233), 2008, 19(8):1-6.

    [2] [2] LEACH R, CHETWYND D, BLUNT L, et al. Recent advances in traceable nanoscale dimension and force metrology in the UK [J]. Measurement Science Technology(S0957-0233), 2006, 17(3):467-476.

    [4] [4] DUBROV M N, ALYOSHIN V A. Precise laser interferometry with 1 pm resolution [J]. Journal of Radio Electronics(S1684-1719), 2004(5):1-4.

    [5] [5] CHASSAGNE L, WAKIM M, XU S, et al. A 2D nanopositioning system with sub-nanometric repeatability over the millimetre displacement range [J]. Measurement Science and Technology(S0957-0233), 2007, 18(11):3267-3272.

    [8] [8] TOPSU S, CHASSAGNE L, HADDAD D, et al. Heterodyne interferometric technique for displacement control at the nanometric scale [J]. Review of Scientific Instruments(S0034-6748), 2003, 74(11):4876-4880.

    [9] [9] CHASSAGNE L, TOPSU S, ALAYLI Y. Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics [J]. Measurement Science and Technology(S0957-0233), 2005, 16(9):1771-1777.

    [13] [13] Heilmann R K, Konkola P T, Chen C G, et al. Relativistic corrections in displacement measuring interferometry [J]. Journal of Vacuum Science and Technology B(S0022-5355), 2000, B18(6):3277-3281.

    [14] [14] XU S, OUEDRAOGO K, CHASSAGNE L, et al. Polarimetric interferometer for nanoscale positioning applications [J]. Review of Scientific Instruments(S0034-6748), 2008, 79(12):1-6.

    Tools

    Get Citation

    Copy Citation Text

    ZHU Weibin, ZHU Shan′an, YE Shuliang. Phase Locked Positioning Method in Heterodyne Interferometer System[J]. Opto-Electronic Engineering, 2014, 41(5): 34

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 30, 2013

    Accepted: --

    Published Online: Jun. 30, 2014

    The Author Email: Weibin ZHU (zhuweibin@cjlu.edu.cn)

    DOI:10.3969/j.issn.1003-501x.2014.05.006

    Topics