Research on All-solid-state Continuous-wave 228 nm Deep Ultraviolet Laser

Zhibin ZHAO; Cheng CHENG; Quan LI; Dongxin XU; Hao CHEN; Guojun LIU; Zhongliang QIAO; Debo WANG; Quan ZHENG; Yi QU; Baoxue BO

doi:10.3788/gzxb20225109.0914003

Acta Photonica Sinica, Volume. 51, Issue 9, 0914003(2022)

Research on All-solid-state Continuous-wave 228 nm Deep Ultraviolet Laser

Zhibin ZHAO1...2, Cheng CHENG2, Quan LI2, Dongxin XU2, Hao CHEN2, Guojun LIU2, Zhongliang QIAO2, Debo WANG2, Quan ZHENG3, Yi QU2,* and Baoxue BO1 |Show fewer author(s)

Author Affiliations

¹State Key Laboratory of High Power Semiconductor Laser，Changchun University of Science and Technology，Changchun 130022，China

²College of Physics and Electronic Engineering，Key Laboratory of Laser Technology and Optoelectronic Functional Materials of Hainan Province，Hainan Normal University，Haikou 571158，China

³Changchun New Industries Optoelectronics Technology Co.，Ltd.，Changchun 130103，China

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Figures & Tables(5)

Fig. 1. Effect of L₁ and L₂ on beam radius inside cavity

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Fig. 2. Experimental setup

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Fig. 3. Output characteristics of 457 nm laser

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Fig. 4. Output characteristics of 228 nm CW DUV laser

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Table 1. Nonlinear optical characteristics for 457 nm and 228 nm generation in borate crystals

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Table 1. Nonlinear optical characteristics for 457 nm and 228 nm generation in borate crystals

Crystal		BiBO	LBO	BBO	KBBF	RBBF
Nonlinear coefficient deff /（pm·V^-1）	457 nm	3.44	0.803	2.01	0.436	0.412
Nonlinear coefficient deff /（pm·V^-1）	228 nm	—	—	1.38	0.387	0.344
Acceptance angle $\times$ length /（mrad $\cdot$ cm）	457 nm	1.13	4.56	0.89	1.43	1.54
Acceptance angle $\times$ length /（mrad $\cdot$ cm）	228 nm	—	—	0.36	0.47	0.52
Walk-off angle /mrad	457 nm	44.99	12.48	61.76	43.36	40.04
Walk-off angle /mrad	228 nm	—	—	75.68	66.05	58.72
Phase-matching angle /（°）	457 nm	θ=159.6	θ=90.0	θ=25.8	θ=22.0	θ=23.7
	457 nm	φ=90.0	φ=21.7	θ=25.8	θ=22.0	θ=23.7
	228nm	—	—	θ=61.4	θ=43.9	θ=48.1
Hygroscopicity		Difficult	Non	Slight	Non	Non
Transmission band range/nm		286~2 500	160~2 600	185~2 600	147~3 500	165~3 500

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Zhibin ZHAO, Cheng CHENG, Quan LI, Dongxin XU, Hao CHEN, Guojun LIU, Zhongliang QIAO, Debo WANG, Quan ZHENG, Yi QU, Baoxue BO. Research on All-solid-state Continuous-wave 228 nm Deep Ultraviolet Laser[J]. Acta Photonica Sinica, 2022, 51(9): 0914003

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