Infrared and Laser Engineering, Volume. 53, Issue 2, 20230590(2024)

Tolerance desensitization method based on principal component analysis and nodal aberration theory

Zihan Guan1,2, Min Wang3, and Xiaotong Li1,2
Author Affiliations
  • 1College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 2State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, China
  • 3ASMPT Hong Kong Limited, Hong Kong SAR 999077, China
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    Figures & Tables(18)
    Asymmetric perturbation model
    Axial perturbation model
    Workflow of tolerance sensitivity reduction
    Layout of Structure 1
    Distribution of eigenvalues
    Zernike coefficients distribution of main eigenvectors
    Weight distribution of induced aberrations in Structure 1
    Distribution of induced coma on different surfaces
    MTF performance before and after optimization of Structure 1 (>98% MTF@36 lp/mm)
    Layout of Structure 2
    Weight distribution of induced aberrations in Structure 2
    Distribution of induced axial aberration on different surfaces
    MTF performance of Structure 2 (>90% MTF@180 lp/mm)
    • Table 1. Several types of induced aberration

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      Table 1. Several types of induced aberration

      Induced aberrationMathematical expression
      Tilt$ {W}_{111}\left(\overrightarrow{\sigma }\cdot \overrightarrow{\rho }\right)={W}_{111}\sigma \rho \mathrm{c}\mathrm{o}\mathrm{s}\theta $
      Uniform coma$ {W}_{131}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{\rho }\cdot \overrightarrow{\rho })={W}_{131}\sigma {\rho }^{3}\mathrm{c}\mathrm{o}\mathrm{s}\theta $
      Linear astigmatism$ {W}_{222}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{H}\cdot \overrightarrow{\rho })={W}_{222}\sigma H{\rho }^{2}{\mathrm{c}\mathrm{o}\mathrm{s}}^{2}\theta $
      Uniform astigmatism$ {W}_{222}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })={W}_{222}{\sigma }^{2}{\rho }^{2}{\mathrm{c}\mathrm{o}\mathrm{s}}^{2}\theta $
    • Table 2. System parameters of Structure 1

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      Table 2. System parameters of Structure 1

      ParameterValue
      Working F#11
      Magnification1.35×
      EFL/mm94
      Wavelength/nm460-635
    • Table 3. Tolerance setting and performance of Structure 1 (36 lp/mm@ MTF, on-axis)

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      Table 3. Tolerance setting and performance of Structure 1 (36 lp/mm@ MTF, on-axis)

      ParameterValue
      Thickness±0.02 mm
      Surface radius±3 fringes
      Surface tilt±1'
      Element decenter±0.015 mm
      Element tilt±1'
      NominalMeanStandard deviation
      Original0.7010.3470.120
      Optimized0.6870.5050.082
    • Table 4. System parameters of Structure 2

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      Table 4. System parameters of Structure 2

      ParameterValue
      NA0.5
      Magnification
      Total length/mm110
      Wavelength/nm460-635
    • Table 5. Tolerance setting and nominal performance of Structure 2 (180 lp/mm@ MTF, on-axis)

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      Table 5. Tolerance setting and nominal performance of Structure 2 (180 lp/mm@ MTF, on-axis)

      ParameterValue
      Thickness±0.01 mm
      Surface radius±1 fringes
      Surface tilt±1'
      Element decenter±0.01 mm
      Element tilt±1'
      NominalMeanStandard deviation
      Original0.3450.2430.075
      Optimized0.3270.2720.066
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    Zihan Guan, Min Wang, Xiaotong Li. Tolerance desensitization method based on principal component analysis and nodal aberration theory[J]. Infrared and Laser Engineering, 2024, 53(2): 20230590

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    Paper Information

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    Received: Oct. 20, 2023

    Accepted: --

    Published Online: Mar. 27, 2024

    The Author Email:

    DOI:10.3788/IRLA20230590

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