Infrared and Laser Engineering, Volume. 53, Issue 2, 20230590(2024)
Tolerance desensitization method based on principal component analysis and nodal aberration theory
Figures & Tables(18)
Fig. 9. MTF performance before and after optimization of Structure 1 (>98% MTF@36 lp/mm)
Fig. 11. Weight distribution of induced aberrations in Structure 2
Fig. 12. Distribution of induced axial aberration on different surfaces
Table 1. Several types of induced aberration
View tableView in ArticleTable 1. Several types of induced aberration
Induced aberration Mathematical expression Tilt $ {W}_{111}\left(\overrightarrow{\sigma }\cdot \overrightarrow{\rho }\right)={W}_{111}\sigma \rho \mathrm{c}\mathrm{o}\mathrm{s}\theta $ Uniform coma $ {W}_{131}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{\rho }\cdot \overrightarrow{\rho })={W}_{131}\sigma {\rho }^{3}\mathrm{c}\mathrm{o}\mathrm{s}\theta $ Linear astigmatism $ {W}_{222}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{H}\cdot \overrightarrow{\rho })={W}_{222}\sigma H{\rho }^{2}{\mathrm{c}\mathrm{o}\mathrm{s}}^{2}\theta $ Uniform astigmatism $ {W}_{222}(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })(\overrightarrow{\sigma }\cdot \overrightarrow{\rho })={W}_{222}{\sigma }^{2}{\rho }^{2}{\mathrm{c}\mathrm{o}\mathrm{s}}^{2}\theta $
Table 2. System parameters of Structure 1
View tableView in ArticleTable 2. System parameters of Structure 1
Parameter Value Working F# 11 Magnification 1.35× EFL/mm 94 Wavelength/nm 460-635
Table 3. Tolerance setting and performance of Structure 1 (36 lp/mm@ MTF, on-axis)
View tableView in ArticleTable 3. Tolerance setting and performance of Structure 1 (36 lp/mm@ MTF, on-axis)
Parameter Value Thickness ±0.02 mm Surface radius ±3 fringes Surface tilt ±1' Element decenter ±0.015 mm Element tilt ±1' Nominal Mean Standard deviation Original 0.701 0.347 0.120 Optimized 0.687 0.505 0.082
Table 4. System parameters of Structure 2
View tableView in ArticleTable 4. System parameters of Structure 2
Parameter Value NA 0.5 Magnification 5× Total length/mm 110 Wavelength/nm 460-635
Table 5. Tolerance setting and nominal performance of Structure 2 (180 lp/mm@ MTF, on-axis)
View tableView in ArticleTable 5. Tolerance setting and nominal performance of Structure 2 (180 lp/mm@ MTF, on-axis)
Parameter Value Thickness ±0.01 mm Surface radius ±1 fringes Surface tilt ±1' Element decenter ±0.01 mm Element tilt ±1' Nominal Mean Standard deviation Original 0.345 0.243 0.075 Optimized 0.327 0.272 0.066
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Zihan Guan, Min Wang, Xiaotong Li. Tolerance desensitization method based on principal component analysis and nodal aberration theory[J]. Infrared and Laser Engineering, 2024, 53(2): 20230590
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Received: Oct. 20, 2023
Accepted: --
Published Online: Mar. 27, 2024
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