[1] [1] Sindhanaiselvi D, Shanmuganantham T. Investigation on performance of piezoelectric beam based MEMS actuator for focussing of micro lens in mobile application［C］// 2017 IEEE Inter. Conf. on Circuits and Systems (ICCS), 2017: 398-403.

[2] [2] Sassa F, Hayashi K. Flexible thermal actuator film for monolithic soft micro robot process［C］// 17th IEEE Sensors Conf., 2018: 1118-1121.

[3] [3] Ren H, Gerhard E. Design and fabrication of a current-pulse-excited bistable magnetic microactuator［J］. Sensors and Actuators A: Physical, 1997, 58(3): 259-264.

[4] [4] Williams J D, Yang R, Wang W. Numerical simulation and test of a UV-LIGA-fabricated electromagnetic micro-relay for power applications［J］. Sensors and Actuators A: Physical, 2005, 120(1): 154-162.

[5] [5] Fu S, Ding G, Wang H, et al. Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay［J］. Microelectronics J., 2007, 38(4/5): 556-563.

[6] [6] Miao X D, Dai X H, Huang Y, et al. Segmented magnetic circuit simulation of the large displacement planar micro-coil actuator with enclosed magnetic yokes［J］. Microelectronic Engineering, 2014, 129: 38-45.

[7] [7] Miao X D, Dai X H, Ding G F, et al. Simulation and fabrication of a bistable electromagnetic micro-actuator［J］. Electromagnetics, 2012, 32(5): 274-286.

[8] [8] Nabae H, Higuchi T. A novel electromagnetic actuator based on displacement amplification mechanism［J］. IEEE-ASME Trans. on Mechatronics, 2015, 20(4): 1607-1615.

[9] [9] Galea R, Dudek K K, Farrugia P S, et al. Reconfigurable magneto-mechanical metamaterials guided by magnetic fields［J］. Composite Structures, 2022, 280: 114921.

[10] [10] Zhi C, Tang B, Wang Y, et al. A self-attachable and self-alignable micro electromagnetic linear actuator［J］. J. of Micromechanics and Microengineering, 2021, 31(1): 015001.

[11] [11] Bedenbecker M, Hahn M, Ruffert C, et al. Linear synchronous micro motor with further miniaturized dimensions［C］// ASME Inter. Design Engineering Technical Conf./Computers and Information in Engineering Conf., 2008: 823-828.

[12] [12] Kim K H, Yoon H J, Jeong O C, et al. Fabrication and test of a micro electromagnetic actuator［J］. Sensors and Actuators A: Physical, 2005, 117(1): 8-16.

[13] [13] Menon R, Kadam A H, Azeez N A, et al. A comprehensive survey on permanent magnet synchronous motor drive systems for electric transportation applications［C］// 42nd Annual Conf. of the IEEE-Industrial-Electronics-Society (IECON), 2016: 6627-6632.

[14] [14] Khayamy M, Chaoui H. Efficient PMSM-inverter-based drive for vehicular transportation systems［J］. IEEE Trans. on Vehicular Technol., 2018, 67(6): 4783-4792.

[15] [15] Andrei C, Kauder T, Karthaus J, et al. Improved rotor pole geometry of a PMSM for wind turbine applications with multiple high-speed generators［C］// Inter. Conf. on Optimization of Electrical and Electronic Equipment (OPTIM), 2014: 450-457.

[16] [16] Shutov M V, Sandoz E E, Howard D L, et al. Miniature linear synchronous motor［J］. Proc. SPIE, 2003, 4878: 32-37.

[17] [17] Feldmann A, Demming S, Lesche C, et al. Novel electro magnetic micro pump［C］// Conf. on BioMEMS and Nanotechnology Ⅲ, 2008: 6799.

[18] [18] Abbes M, Belharet K, Mekki H, et al. Permanent magnets based actuator for microrobots navigation［C］// IEEE/RSJ Inter. Conf. on Intelligent Robots and Systems (IROS), 2019: 7062-7067.

[19] [19] Miao Xiaodan, Dai Xuhan, Wang Peihong, et al. Design, fabrication and characterization of a bistable electromagnetic microrelay with large displacement［J］. Microelectronics J., 2011, 42: 992-998.