Semiconductor Optoelectronics, Volume. 43, Issue 6, 1092(2022)

Study of Planar Electromagnetic Linear Actuators with Integrated Manufacturing

WU Qiang1... GUAN Weichang2, DAI Xuhan1, WANG Huaizhi1, GAO Yufan1 and DING Guifu1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    The electromagnetic actuator has a wide application prospect in communication, automatic testing, and power electronics due to its high output force, long stroke, and no contact, but it is difficult to meet the development demand of miniaturization and integration of electronic systems in related fields due to its large size and complicated manufacturing process. To address the above problems, a prototype of miniaturized electromagnetic actuator was designed and manufactured by applying planar integrated coils and high aspect ratio microstructure. Preliminary test results show that the output force of the device can reach the mN level, the output displacement is greater than 50μm, and the response time is less than 10ms, which indicates a feasible technical path for further research on the device.

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    WU Qiang, GUAN Weichang, DAI Xuhan, WANG Huaizhi, GAO Yufan, DING Guifu. Study of Planar Electromagnetic Linear Actuators with Integrated Manufacturing[J]. Semiconductor Optoelectronics, 2022, 43(6): 1092

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    Paper Information

    Special Issue:

    Received: Nov. 21, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022112101

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