Acta Photonica Sinica, Volume. 34, Issue 3, 477(2005)
The Effect of ion Current Density in ion Beam Assisted Deposition
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of ion Current Density in ion Beam Assisted Deposition[J]. Acta Photonica Sinica, 2005, 34(3): 477