[1] [1] Yamaguchi Hitomi，Shinmura Takeo，Takenaga Maki. Development of a new precision internal machining process using an alternating magnetic field [J]. Precision Engineering(S0141-6359)，2003，27(1)：51-58.

[2] [2] YUAN Julong，WANG Zhiwei，WEN Donghui，et al. Review of the current situation of ultra-precision machining [J]. Chinese Journal of Mechanical Engineering，2007，43(1)：35-48.

[3] [3] Lonardo P M，Lucca D A，De Chiffre L. Emerging trends in surface metrology [J]. CIRP Annals-Manufacturing Technology(S0007-8506)，2002，51(2)：701-723.

[4] [4] WANG Yunqing，LI Qingxiang，ZHOU Zaoying，et al. Dynamic analysis and nonlinear error elimination of the stylus-based profile measuring mechanism [J]. Chinese Journal of Scientific Instrument，1996，17(6)：606-611.

[5] [5] http：//www.taylor-hobson.com.

[6] [6] Binnig G，Rohrer H，Gerber Ch，et al. Surface studies by scanning tunneling microscopy [J]. Phys. Rev. Lett(S0031-9007)， 1982，49(1)：57–60.

[7] [7] Rabe U，Arnold W. Atomic-force microscopy at MHz frequencies [J]. Annalen der Physik (S1521-3889)，1994，3(7/8)： 589-598.

[8] [8] Cuche E，Bevilacqua F，Depeursinge C. Digital holography for quantitative phase-contrast imaging [J]. Opt. Lett(S0146-9592)， 1999，24(5)：291-293.

[9] [9] Marquet P，Rappaz B，Magistretti J，et al. Digital holographicmicroscopy：a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy [J]. Opt. Lett(S0146-9592)，2005，30(5)：468-470.

[10] [10] ZHONG Liyun，ZHANG Yimo，Lü Xiaoxu，et al. Analysis of Some Fundamental Issue about Digital Hologram [J]. Acta Optica Sinica，2004，24(4)：465-471.

[11] [11] Yamaguchi I，Ida T，Yokota M，et al. Surface shape measurement by phase-shifting digital holography with a wavelength shift [J]. Applied Optics(S1539-4522)，2006，45(29)：7610-7616.

[12] [12] ZENG Yanan，WANG Fei，LEI Hai，et al. Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography [J]. Acta Optica Sinica，2013，33(10)：1009001.

[13] [13] Itoh K. Analysis of the phase unwrapping algorithm [J]. Applied Optics(S1539-4522)，1982，21(14)：2470.

[14] [14] ZHANG Yizhuo，WANG Dayong，ZHAO Jie，et al. Investigation on Phase Unwrapping Algorithms in Digital Holography [J]. Acta Optica Sinica，2009，29(12)：3323-3327.

[15] [15] Kuhn J，Colomb T，Montfort F，et al. Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition [J]. Opt. Express(S094-4087)，2007，15(12)：7231-7242.

[16] [16] WANG Yujia，JIANG Zhuqing，GAO Zhirui，et al. Investigation on Phase Unwrapping in Dual-Wavelength Digital Holography [J]. Acta Optica Sinica，2012，32(10)：1009001-6.