Acta Photonica Sinica, Volume. 50, Issue 9, 0912003(2021)

Morphology Measurement of Glass Micromachining Based on Digital Holography

Weixia LI... Sujuan HUANG and Cheng YAN |Show fewer author(s)
Author Affiliations
  • Key Laboratory of Special Fiber Optics and Optical Access Networks,School of Communication and Information Engineering, Shanghai University, Shanghai200072, China
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    Figures & Tables(10)
    Schematic diagram of experimental setup
    Morphology simulation of flat, convex microlen
    Morphology measurement of flat, convex microlen array
    Morphology distribution of linear microstructure under different laser power
    Lithography depth and maximum recondensed height of linear microstructure under different laser power
    Morphology distribution of linear microstructure under different marking speed
    Lithography depth and maximum recondensed height of linear microstructure under different marking speed
    Morphology distribution of linear microstructure under different Q frequency
    Lithography depth and maximum recondensed height of linear microstructure under different Q frequency
    • Table 1. Depth of flat, convex microlen array

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      Table 1. Depth of flat, convex microlen array

      Sample No.

      Depth measured

      by our method/μm

      Depth measured

      by optical profilometer/μm

      10.9940.991
      20.9780.981
      30.9600.960
      40.9640.964
      50.9630.963
      60.9700.965
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    Weixia LI, Sujuan HUANG, Cheng YAN. Morphology Measurement of Glass Micromachining Based on Digital Holography[J]. Acta Photonica Sinica, 2021, 50(9): 0912003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 6, 2021

    Accepted: May. 7, 2021

    Published Online: Oct. 22, 2021

    The Author Email:

    DOI:10.3788/gzxb20215009.0912003

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