Acta Photonica Sinica, Volume. 50, Issue 9, 0912003(2021)
Morphology Measurement of Glass Micromachining Based on Digital Holography
Fig. 4. Morphology distribution of linear microstructure under different laser power
Fig. 5. Lithography depth and maximum recondensed height of linear microstructure under different laser power
Fig. 6. Morphology distribution of linear microstructure under different marking speed
Fig. 7. Lithography depth and maximum recondensed height of linear microstructure under different marking speed
Fig. 8. Morphology distribution of linear microstructure under different Q frequency
Fig. 9. Lithography depth and maximum recondensed height of linear microstructure under different Q frequency
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Weixia LI, Sujuan HUANG, Cheng YAN. Morphology Measurement of Glass Micromachining Based on Digital Holography[J]. Acta Photonica Sinica, 2021, 50(9): 0912003
Category: Instrumentation, Measurement and Metrology
Received: Apr. 6, 2021
Accepted: May. 7, 2021
Published Online: Oct. 22, 2021
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