Material removal efficiency in ion beam figuring for optical component

JIAO Chang-jun; XIE Xu-hui; LI Sheng-yi; ZHOU Lin

Optics and Precision Engineering, Volume. 16, Issue 8, 1343(2008)

JIAO Chang-jun*... XIE Xu-hui, LI Sheng-yi and ZHOU Lin |Show fewer author(s)

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References(5)

[2] [2] LYNN N A,ROBERT E K.An ion figuring system for large optic fabrication[J].SPIE,1989,1168:33-50

[3] [3] FLAMM D,SCHINDLER A,BERGER M.Ion beam milling of optically polished CaF2 surfaces[J].SPIE,2003,5180:81-88

[4] [4] BEHRISCH R.Sputtering by Particle Bombardment I[M].New York:Springer-Verlag,1981

[5] [5] MAXIM A M,RODOLFO C,ALBERT-LASZLO B.Morphology of ion-sputtered surfaces[J].NIM B,2002,197:185-227

[7] [7] JIAO CH,XIE X H,Ll SH Y,et al..Design of ion beam figuring machine for optics mirrors[C].Asia Pacific Precision Engineer for Optics Manufacture 2007,HongKong,Janua,2007:13-17

CLP Journals

[1] WANG Xiao-kun, XUE Dong-lin, ZHANG Xue-jun. Fabrication and testing of large aspheric system based on common reference[J]. Optics and Precision Engineering, 2018, 26(4): 743

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JIAO Chang-jun, XIE Xu-hui, LI Sheng-yi, ZHOU Lin. Material removal efficiency in ion beam figuring for optical component[J]. Optics and Precision Engineering, 2008, 16(8): 1343

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