Acta Optica Sinica, Volume. 42, Issue 23, 2312005(2022)
Suppression Method for Vibration Error in Φ600 mm Wavelength-Tuning Interferometer
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Donghui Zheng, Lei Chen, Zhiyao Ma, Jinpeng Li, Chenhui Hu. Suppression Method for Vibration Error in Φ600 mm Wavelength-Tuning Interferometer[J]. Acta Optica Sinica, 2022, 42(23): 2312005
Category: Instrumentation, Measurement and Metrology
Received: Jun. 2, 2022
Accepted: Jul. 28, 2022
Published Online: Dec. 14, 2022
The Author Email: Zheng Donghui (zdonghui@njust.edu.cn)