To suppress the vibration-induced measurement error in the Φ600 mm wavelength-tuning interferometer, this paper presents a wavelength-tuning vibration suppression algorithm. In this algorithm, a theoretical vibration model based on wavelength-tuning phase shifting is constructed, and the relationship curve between the light intensity and the initial phase is established. The actual phase is retrieved after the initial phase is corrected by the harmonic coefficients extracted from the spectrum. The error suppression coefficient is introduced as an evaluation parameter. Furthermore, the algorithm is applied to a Φ600 mm wavelength-tuning phase-shifting plane interferometer, and the vibration-induced double-frequency "ripple" error is suppressed well by the algorithm. Specifically, the peak-to-valley (PV) value of the wavefront is decreased from 0.1180λ to 0.0951λ (λ is wavelength), and the root-mean-square (RMS) value is reduced from 0.0164λ to 0.0135λ. The above results verify the effectiveness of the proposed vibration suppression algorithm on wavelength-tuning phase-shifting interferometers.