Dichroic laser mirrors with mixture layers and sandwich-like-structure interfaces

Tingting Zeng; Meiping Zhu; Yingjie Chai; Jingping Li; Jianda Shao

doi:10.1364/PRJ.411372

Photonics Research, Volume. 9, Issue 2, 229(2021)

Dichroic laser mirrors with mixture layers and sandwich-like-structure interfaces Editors' Pick

Tingting Zeng^1,2, Meiping Zhu^1,2,3、*, Yingjie Chai⁴, Jingping Li¹, and Jianda Shao^1,2,3,5,6

¹Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China

⁴CREOL, The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816, USA

⁵CAS Center for Excellence in Ultra-intense Laser Science, Shanghai 201800, China

⁶e-mail: jdshao@siom.ac.cn

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Figures & Tables(12)

Fig. 1. Schematic diagram of the proposed MDLM design.

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Fig. 2. Schematic diagram of the deposition process of MDLM coating.

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Fig. 3. Microstructure and optical property of the pure monolayer, nanolaminate, and mixture coatings. (a) XRD spectra, (b) transmittance, and (c) optical bandgap versus n of HfO2 monolayer, Al2O3 monolayer, HfO2−Al2O3 nanolaminate, and mixture coatings. (d) Surface figure change (ΔPower) caused by the HfO2−Al2O3 nanolaminate and mixture coatings.

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$Dispersion curves of refractive indices of HfO2 monolayer, Al2O3 monolayer, and HfO2−Al2O3 mixture coatings.$

Fig. 4. Dispersion curves of refractive indices of HfO2 monolayer, Al2O3 monolayer, and HfO2−Al2O3 mixture coatings.

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Fig. 5. Elemental percentage profiles from the high-n layer to the low-n layer.

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Fig. 6. Microstructure and optical property of the TDLM and MDLM coatings. (a) XRD spectra. (b) Transmittance (left: incident angle at 0°; middle: incident angle at 45°, p-polarized light) and reflectance spectra (right: incident angle at 45°, s-polarized light). (c) Surface figures of the samples before and after coating. (d) Surface and cross-section morphologies after the scratch test. (e) Single-pulse damage probability as a function of the input fluence.

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Fig. 7. Damage morphology imaged by SEM and the depth profile of the marked area measured by FIB. (a)–(d) Damaged sites and (e)–(h) schematic diagram of the damage morphologies after irradiation of an s-polarized 532 nm laser. (i) and (j) Plasma scald induced by s-polarized 532 nm laser in MDLM coating.

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Fig. 8. Damage morphology imaged by SEM and the depth profile of the marked area measured by FIB. (a) and (b) Full field-of-view of the damaged area. (c)–(i) Typical damaged sites marked with asterisks. (j)–(m) Schematic diagram of the damage morphologies after irradiation of a p-polarized 1064 nm laser.

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Fig. 9. EDS characterized chemical composition of the damaged site of the TDLM coating and MDLM coating induced by 1064 nm p-polarized laser.

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Fig. 10. Simulated laser-induced temperature rises in TDLM and MDLM coatings.

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Table 1. Design Information and Extracted Thickness of the Nanolaminate Coatings^a

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Table 1. Design Information and Extracted Thickness of the Nanolaminate Coatings^a

Sample Number	Design Structure	Design Thickness in Each $B_{A} B_{H}$ Bilayer (nm)		Total Thickness Fitted by Measured Transmittance (nm)
Sample Number	Design Structure	$B_{A}$	$B_{H}$	Total Thickness Fitted by Measured Transmittance (nm)
NL1	$Sub \| {(B_{A} B_{H})}^{10} \| Air$	32.5	11.1	427.9
NL2	$Sub \| {(B_{A} B_{H})}^{30} \| Air$	11.0	3.9	445.9
NL3	$Sub \| {(B_{A} B_{H})}^{60} \| Air$	5.6	2.1	464.9
NL4	$Sub \| {(B_{A} B_{H})}^{60} \| Air$	2.9	1.2	259.7

Table 2. Extracted Defect Parameters
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Table 2. Extracted Defect Parameters
$D_{1}$ $T_{1}$ $Δ T_{1}$ $D_{2}$ $T_{2}$ $Δ T_{2}$
( ${mm}^{- 2}$ ) ( $J / {cm}^{2}$ ) ( $J / {cm}^{2}$ ) ( ${mm}^{- 2}$ ) ( $J / {cm}^{2}$ ) ( $J / {cm}^{2}$ )
TDLM 3.5 6.8 1.5 18.5 12.6 1.0
MDLM 3.3 13.7 2.0 12.3 29.2 1.0

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Tingting Zeng, Meiping Zhu, Yingjie Chai, Jingping Li, Jianda Shao. Dichroic laser mirrors with mixture layers and sandwich-like-structure interfaces[J]. Photonics Research, 2021, 9(2): 229

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Paper Information

Category: Lasers and Laser Optics

Received: Oct. 15, 2020

Accepted: Dec. 11, 2020

Published Online: Jan. 29, 2021

The Author Email: Meiping Zhu (bree@siom.ac.cn)

DOI:10.1364/PRJ.411372

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Design Information and Extracted Thickness of the Nanolaminate Coatingsa

Table 1. Design Information and Extracted Thickness of the Nanolaminate Coatingsa

Table 2. Extracted Defect Parameters

Table 2. Extracted Defect Parameters

Table 1. Design Information and Extracted Thickness of the Nanolaminate Coatings^a

Table 1. Design Information and Extracted Thickness of the Nanolaminate Coatings^a