Optics and Precision Engineering, Volume. 17, Issue 4, 807(2009)
Design of distributed micro-area micro/nano-imprinting lithographic system
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
SHEN Su, ZHOU Lei, WEI Guo-jun, CHEN Lin-sen. Design of distributed micro-area micro/nano-imprinting lithographic system[J]. Optics and Precision Engineering, 2009, 17(4): 807
Paper Information
Category:
Received: Jul. 16, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Su SHEN (shen.su@gmail.com)
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20