GHz bursts in MHz burst (BiBurst) enabling high-speed femtosecond laser ablation of silicon due to prevention of air ionization

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

doi:10.1088/2631-7990/acc0e5

International Journal of Extreme Manufacturing, Volume. 5, Issue 2, 25002(2023)

GHz bursts in MHz burst (BiBurst) enabling high-speed femtosecond laser ablation of silicon due to prevention of air ionization

[in Chinese]1... [in Chinese]1, [in Chinese]1,2, [in Chinese]2 and [in Chinese]1,* |Show fewer author(s)

Author Affiliations

¹RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan

²Department of Applied Physics, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. GHz bursts in MHz burst (BiBurst) enabling high-speed femtosecond laser ablation of silicon due to prevention of air ionization[J]. International Journal of Extreme Manufacturing, 2023, 5(2): 25002

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Paper Information

Received: Mar. 30, 2022

Accepted: --

Published Online: Jul. 26, 2024

The Author Email: (ksugioka@riken.jp)

DOI:10.1088/2631-7990/acc0e5

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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