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Infrared and Laser Engineering, Volume. 52, Issue 11, 20230356(2023)

Analysis and study of the diffraction efficiency of self-traceable grating

Lijie Liang1,2,3, Liqin Liu2,3, Yuqing Guan2,3, Jiayuan Sun2,3, Wenzhe Zou2,3, Chuangwei Guo2,3, Yujie Zhang2,3, Xiaoyao Chu1,2,3, Bin Guo1, and Lihua Lei2,3
Author Affiliations
  • 1College of Metrology and Testing Engineering, China Jiliang University, Hangzhou 310018, China
  • 2Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
  • 3Shanghai Key Laboratory of Online Testing and Control Technology, Shanghai 201203, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
    Equations (13)
    References (21)
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    Figures & Tables(12)
    Schematic diagram of self-traceable grating preparation

    Fig. 1. Schematic diagram of self-traceable grating preparation

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    Schematic diagram of the self-traceable grating diffraction

    Fig. 2. Schematic diagram of the self-traceable grating diffraction

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    (a) Diffraction efficiency of self-traceable grating −1th-order under different polarization states; (b) Diffraction efficiency deviation curve

    Fig. 3. (a) Diffraction efficiency of self-traceable grating −1th-order under different polarization states; (b) Diffraction efficiency deviation curve

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    (a) Diffraction efficiency at different incidence angles; (b) Diffraction efficiency deviation curve

    Fig. 4. (a) Diffraction efficiency at different incidence angles; (b) Diffraction efficiency deviation curve

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    (a) Diffraction efficiency at different incident wavelengths; (b) Diffraction efficiency deviation curve

    Fig. 5. (a) Diffraction efficiency at different incident wavelengths; (b) Diffraction efficiency deviation curve

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    Diffraction efficiencies of different incidence angles varying with the incident wavelength

    Fig. 6. Diffraction efficiencies of different incidence angles varying with the incident wavelength

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    (a) Diffraction efficiency at different grating groove depths; (b) Diffraction efficiency deviation curve

    Fig. 7. (a) Diffraction efficiency at different grating groove depths; (b) Diffraction efficiency deviation curve

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    (a) Diffraction efficiency at different grating periods; (b) Diffraction efficiency deviation curve

    Fig. 8. (a) Diffraction efficiency at different grating periods; (b) Diffraction efficiency deviation curve

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    Diffraction efficiencies of different incidence angles varying with the grating period

    Fig. 9. Diffraction efficiencies of different incidence angles varying with the grating period

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    System physical diagram

    Fig. 10. System physical diagram

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    • Table 1. Grating −1th-order diffraction efficiency at different Littrow angles

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      Table 1. Grating −1th-order diffraction efficiency at different Littrow angles

      Littrow angle θ/(°) Grating diffraction efficiency Incident wavelengthλ/ nm Littrow angle θ/(°) Grating diffraction efficiency Incident wavelength λ/nm
      60.02.953%368.5875.04.043%411.10
      62.52.997%377.5177.54.202%415.51
      65.03.122%385.7280.04.201%419.13
      67.53.329%393.2082.53.889%421.96
      70.03.570%399.9385.03.430%423.98
      72.53.816%405.9087.51.772%425.20

    • Table 2. Actual measurement of diffraction efficiency of self-traceable grating −1th-order at different incidence angles

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      Table 2. Actual measurement of diffraction efficiency of self-traceable grating −1th-order at different incidence angles

      Incident angle θ/(°) Self-traceable grating diffraction efficiency measurementMaximum absolute deviation
      123456
      650.31%0.37%0.35%0.37%0.40%0.33%2.59%
      670.54%0.52%0.62%0.52%0.56%0.52%3.21%
      690.63%0.58%0.67%0.51%0.57%0.58%3.23%
      710.63%0.52%0.63%0.47%0.52%0.52%3.33%
      730.54%0.50%0.57%0.42%0.52%0.51%3.38%
      750.50%0.44%0.42%0.37%0.47%0.47%3.42%
      770.42%0.37%0.32%0.31%0.37%0.42%3.47%
      790.36%0.27%0.26%0.21%0.30%0.31%3.53%
      810.26%0.21%0.19%0.16%0.21%0.21%3.48%
      830.21%0.15%0.16%0.14%0.15%0.16%3.30%
      850.11%0.10%0.11%0.10%0.09%0.11%2.96%
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    Lijie Liang, Liqin Liu, Yuqing Guan, Jiayuan Sun, Wenzhe Zou, Chuangwei Guo, Yujie Zhang, Xiaoyao Chu, Bin Guo, Lihua Lei. Analysis and study of the diffraction efficiency of self-traceable grating[J]. Infrared and Laser Engineering, 2023, 52(11): 20230356

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    Paper Information

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    Received: Jun. 20, 2023

    Accepted: --

    Published Online: Jan. 8, 2024

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    DOI:10.3788/IRLA20230356

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology