Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

Weiping Zhou; Shi Bai; Zuwu Xie; Mingwei Liu; Anming Hu

doi:10.12086/oee.2022.210330

Opto-Electronic Engineering, Volume. 49, Issue 1, 210330-1(2022)

Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

Weiping Zhou^1、*, Shi Bai², Zuwu Xie¹, Mingwei Liu¹, and Anming Hu³

¹Key Laboratory of Intelligent Sensors and Advanced Sensing Materials of Hunan Province, School of Physics and Electronic Science, Hunan University of Science and Technology, Xiangtan, Hunan 411201, China

²Advanced Laser Processing Research Team, RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

³Advanced Manufacturing & NanoEngineering Lab, 578 Violet Street, Waterloo, ON N2V 2V6, Canada

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Weiping Zhou, Shi Bai, Zuwu Xie, Mingwei Liu, Anming Hu. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electronic Engineering, 2022, 49(1): 210330-1

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Paper Information

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Received: Oct. 17, 2021

Accepted: --

Published Online: Apr. 6, 2022

The Author Email: Zhou Weiping (joweiping@hnust.edu.cn)

DOI:10.12086/oee.2022.210330

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology