Opto-Electronic Engineering, Volume. 49, Issue 1, 210330-1(2022)
Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices
As a low-cost, high-efficiency, and high-precision processing technology, laser direct writing can be applied to rapidly prototype two-dimensional or three-dimensional micro/nano-structures with almost arbitrary degrees of freedoms. This is of great significance to the fabrication of optoelectronics and semiconductor micro-nano structures and devices. Metal micro/nano-structures have a wide range of applications in electronics and photonics. This article reviews the research progress of laser direct writing of metal micro/nano-structures, including the preparation of micro/nano-structures and devices using gold, silver, copper and their composite materials. Subsequently, the research progress of laser direct writing on surface-enhanced Raman spectroscopy microfluidic chip is reviewed. With increase of requirements for environmental protection, functional carbon materials are extensively used in many fields. Compared with the traditional thermal carbonization method, the laser direct writing process can realize the fabrication of fine patterned micro/nano-structures on the surface. This article reviews the research progress of laser in-situ reduction of graphene oxide, laser carbonized wood, leaves and other wood materials. By reviewing the research of our research group and other related research results, this article can provide reference for the research and application of laser direct writing of metal and carbon material for micro/nano-structures and devices.
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Weiping Zhou, Shi Bai, Zuwu Xie, Mingwei Liu, Anming Hu. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electronic Engineering, 2022, 49(1): 210330-1
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Received: Oct. 17, 2021
Accepted: --
Published Online: Apr. 6, 2022
The Author Email: Zhou Weiping (joweiping@hnust.edu.cn)