Optics and Precision Engineering, Volume. 17, Issue 7, 1635(2009)
Comparison of different processes in making EHD micropump electrode
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YU He, ZHANG Qiang, QIAO Da-yong, YU Jian. Comparison of different processes in making EHD micropump electrode[J]. Optics and Precision Engineering, 2009, 17(7): 1635
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Received: Jan. 20, 2009
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: He YU (yuh@emails.bjut.edu.cn)
CSTR:32186.14.
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