Fig. 1. Diffraction vector of grating coupler

Fig. 2. The structure of grating coupler

Fig. 3. Electric field and coupling efficiency of grating coupler

Fig. 4. Design diagram of optical path system

Fig. 5. Transverse ray fan plot and Spot diagram of optical system

Fig. 6. Experimental optical and mechanical system and micro-nano sensing chip partial structure

Fig. 7. Spectral scan of the space optical system through the chip pass terminal

Fig. 8. Comparison of single-loop transmission spectrum between optical system and optical array in the same structure

Fig. 9. Transmission spectrum sampling diagram of temperature sensing test

Fig. 10. Fitting curve of the central wavelength of transmission spectrum as a function of temperature